Due: 09/06/12 Research and describe a layering technology we didn’t discuss: Atomic Layer Deposition (ALD) • what type of deposition is this and
how does it differ from other techniques of the same type?
• what are the key components/reactions?
• describe the process
• give at least one example of its use
in current (>2000) literature (describe why it was important in that case)
|